EE6007 Micro Electro Mechanical Systems | Impotent Questions | Question bank | Syllabus | Model and Previous Question papers | Download PDF

EE6007 Micro Electro Mechanical Systems

EE6007 Micro Electro Mechanical Systems | Impotent  Questions | Question bank | Syllabus | Model and Previous Question papers | Download PDF Exammain.com Important Questions is available for download in this page for EE6007 Micro Electro Mechanical Systems. Students can download the Important Questions in the PDF format or in Word format. Questions Bank and Previous year question papers also be available in this page  . Important Questions provided here are the Expected questions that are possible to be appeared in the upcoming exams. you can make use of the below questions and prepare for your exams. EE6007 Micro Electro Mechanical Systems Important Questions . Download the Important Questions using the below link.

Subject Informations : 

University  :  Anna University
Department  : Department Of Electrical And Electronics Engineering
Semester  : 08 th
Year  : 04 th year
Regulation  : R2013
Subject Code  : EE6007
Subject Name  :  Micro Electro Mechanical Systems

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Micro Electro Mechanical Systems | Impotent  Questions
EE6007 Micro Electro Mechanical Systems Syllabus	Click Here to Download
EE6007 Micro Electro Mechanical Systems Part A Important Questions	Click Here to Download
EE6007 Micro Electro Mechanical Systems Part B Important Questions	Click Here to Download  >>
EE6007 Micro Electro Mechanical Systems Question Bank	Click Here to Download
EE6007 Micro Electro Mechanical Systems Full Study Material	Click Here to Download
Other Subject Impotent Questions	Click Here to Download

Anna University 2013 Regulation Syllabus - EE6007 Micro Electro Mechanical Systems 

UNIT I INTRODUCTION                  9 

Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication - Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS –Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.

UNIT II SENSORS AND ACTUATORS-I                    9 

Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices –Micro Grippers – Micro Motors - Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph - Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys

UNIT III SENSORS AND ACTUATORS-II                     9 

Piezoresistive sensors – Piezoresistive sensor materials - Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials –Applications to Inertia , Acoustic, Tactile and Flow sensors.

UNIT IV MICROMACHINING                                       9 

Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies - Basic surface micro machining processes –Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process -Assembly of 3D MEMS – Foundry process.

UNIT V POLYMER AND OPTICAL MEMS                     9 


Polymers in MEMS– Polimide - SU-8 - Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon -Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.

Also check :

EE6007 Micro Electro Mechanical Systems Notes - Click here to Download 

EE6007 Micro Electro Mechanical Systems Questions Papers - Click here to Download 

EE6007 Micro Electro Mechanical Systems 2 marks with answers - Click here to Download 

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